Computation lithography: virtual reality and virtual virtuality.
نویسندگان
چکیده
Computation lithography is enabled by a combination of physical understanding, mathematical abstraction, and implementation simplification. An application in the virtual world of computation lithography can be a virtual reality or a virtual virtuality depending on its engineering sensibleness and technical feasibility. Examples under consideration include design-for-manufacturability and inverse lithography.
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ورودعنوان ژورنال:
- Optics express
دوره 17 15 شماره
صفحات -
تاریخ انتشار 2009